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Influence Of Open-Tube Ga Diffusion On The Characteristics For Thyristor
Published online by Cambridge University Press: 10 February 2011
Abstract
Open-tube Ga diffusion into a SiO2/Si structure was used for fabrication of the high speed thyristor. The advantages of open-tube Ga diffusion are as follows; it is easier to operate and easier to control the profile of the Ga concentration during processing, a clean surface, which is free from alloy spots can be obtained, this technique ensures to improve the on-state characteristics and dynamic characteristics.
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- Copyright © Materials Research Society 1998