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High Temperature Superconducting Step-Edge SNS Josephson Junctions on Silicon Substrates

Published online by Cambridge University Press:  15 February 2011

P. A. Rosenthal ,
J. E. Cosgrove ,
D. B. Fenner ,
L. R. Vale ,
R. H. Ono  and
D. A. Rudman
P. A. Rosenthal
Affiliation:
Advanced Fuel Research, Inc, East Hartford, CT
J. E. Cosgrove
Affiliation:
Advanced Fuel Research, Inc, East Hartford, CT
D. B. Fenner
Affiliation:
Advanced Fuel Research, Inc, East Hartford, CT
L. R. Vale
Affiliation:
NIST, Boulder, CO.
R. H. Ono
Affiliation:
NIST, Boulder, CO.
D. A. Rudman
Affiliation:
NIST, Boulder, CO.
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Abstract

We have fabricated and tested YBCO step-edge SNS Josephson junctions on silicon substrates. The silicon step edges were patterned photolithographically and reactively ion etched using an SF6 plasma. The structures were fabricated through sequential angled pulsed laser deposition of yttria stabilized zirconia, YBCO, and gold layers, followed by photolithographic patterning and ion milling. The completed devices showed resistively shunted junction (RSJ)-like current voltage characteristics and microwave induced Shapiro steps. Critical currents as large as 84 PA and resistances of order 0.5 Ω were obtained. Measurable critical currents were observed up to 76 K. We report on the fabrication and properties of these junctions.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 401: Symposium G – Epitaxial Oxide Thin Films II , 1995 , 297
Copyright
Copyright © Materials Research Society 1996

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References

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