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Electrical Detection of Oscillations in Micro- and Nano- Cantilevers Using Harmonic Detection of Resonance

Published online by Cambridge University Press:  01 February 2011

J. Gaillard ,
Razvan Ciocan ,
Malcolm J. Skove  and
Apparao M. Rao
J. Gaillard
Affiliation:
[email protected], Clemson University, 118 Kinard Hall, Clemson, SC, 29634, United States, 864-656-4447, 864-656-0805
Razvan Ciocan
Affiliation:
[email protected], Clemson University, Physics and Astronomy, United States
Malcolm J. Skove
Affiliation:
[email protected], Clemson University, Physics and Astronomy, United States
Apparao M. Rao
Affiliation:
[email protected], Clemson University, Physics and Astronomy, United States
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Abstract

Accurate determination of the resonant frequency, phase and quality factor in micro and nano-mechanical oscillators permits the detection of: (i) trace amounts of specific adsorbed molecules which affect the resonant frequency; (ii) pressure variations which affect the mechanical damping of the oscillator; or (iii) the temperature dependence of the elastic properties of the oscillator through a shift in the resonant frequency. To date, electrical detection of oscillations in cantilevered multiwalled carbon nanotubes (MWNTs) has eluded researchers in the field. Electrical detection allows a simple means for measuring the resonance frequency, phase and quality factor of cantilevers built into integrated circuits, or cantilevers whose response can be monitored as a function of any external parameter such as temperature or pressure. To this end, we described a fully electrical (actuation and detection) method termed harmonic detection of resonance (HDR) to measure mechanical oscillations in ambient conditions for two systems: Si-based micro- and MWNT based nano-cantilevers. Furthermore, we demonstrate that the resonant frequency in micro- and nano-cantilevers can be tuned without appreciable change in the quality factor which suggests that HDR is an ideal platform in device design and applications.

Keywords

microelectro-mechanical (MEMS)nanoscaleelastic properties
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 888: Symposium V – Materials and Devices for Smart Systems II , 2005 , 0888-V02-03
Copyright
Copyright © Materials Research Society 2006

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References

REFERENCES

1. Sazonova, V., Yaish, Y., Ustunel, H., Roundy, D., Arias, T. A., and McEuen, P. L., Nature, 431, 284 (2004).Google Scholar
2. Knobel, R. G. and Cleland, A. N., Nature, 424, 291 (2003)Google Scholar
3. Poncharal, P., Wang, Z. L., Ugarte, D., and de Heer, W. A., Science 283, 1513 (1999).Google Scholar
4. Yu, M- F., Wagner, G. J., Ruoff, R. S., and Dyer, M. J., Phys. Rev. B 66, 073406 (2002).Google Scholar
5. Purcell, S. T., Vincent, P., Journet, C., Vu, Thien Binh, Phys. Rev. Lett. 89, 276103–1 (2002).Google Scholar
6. Yum, K., Wang, Z., Suryavanshi, A. P., and Yu, M., J. Appl. Phys. 96, 3933 (2004).Google Scholar
7. Gaillard, J., Skove, M. J., and Rao, A. M., App. Phys. Lett. 86, 233109–1 (2005).Google Scholar
8. Sarid, Dror, “Scanning Force Microscopy”, Oxford University Press, New York 1991, p.143.Google Scholar
9. Andrews, R., Jacques, D., Rao, A. M., Derbyshire, F., Qian, D., Fan, X., Dickey, E. C., and Chen, J., Chem. Phys. Letters, 303, 467 (1999).Google Scholar