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The Development and Evaluation of TiO2 Nanoparticle Films for Conductometric Gas Sensing on MEMS Microhotplate Platforms

Published online by Cambridge University Press:  01 February 2011

Kurt D. Benkstein ,
Christopher B. Montgomery ,
Mark D. Vaudin  and
Steve Semancik
Kurt D. Benkstein
Affiliation:
Chemical Science and Technology Laboratory, National Institute of Standards and Technology 100 Bureau Drive, MS 8362, Gaithersburg, MD 20899–8362, U.S.A.
Christopher B. Montgomery
Affiliation:
Chemical Science and Technology Laboratory, National Institute of Standards and Technology 100 Bureau Drive, MS 8362, Gaithersburg, MD 20899–8362, U.S.A.
Mark D. Vaudin
Affiliation:
Materials Science and Engineering Laboratory
Steve Semancik
Affiliation:
Chemical Science and Technology Laboratory, National Institute of Standards and Technology 100 Bureau Drive, MS 8362, Gaithersburg, MD 20899–8362, U.S.A.
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Abstract

Over the past decade, MEMS microhotplate devices have been developed at the National Institute of Standards and Technology to support semiconductor metal oxide films for use in conductometric gas sensor arrays. In most cases, the materials have been based on compact thin films of SnO2 or TiO2 deposited by single-source precursor chemical vapor deposition. Of particular interest to our group is the enhancement of the sensitivity of the microsensors to trace gas species by inducing nanostructured porosity and large internal surface areas in the films. In this presentation, we discuss the development of nanostructured sensor materials based on porous TiO2 nanoparticle thin films. The preparation and evaluation of pure and Nb-doped TiO2 nanoparticle films are described. The films on the MEMS microhotplate substrates are evaluated as conductometric gas sensors based on the critical performance elements of sensitivity, stability, speed and selectivity. The sensor performance, and specifically the sensitivity, of the novel nanoparticle TiO2 films is compared with that of traditional compact CVD-derived films.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 828: Symposium A – Semiconductor Materials for Sensing , 2004 , A7.4
Copyright
Copyright © Materials Research Society 2005

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