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Continuous Amorphous Silicon Depositions Over Large and Very Large (> IM2 ) Areas

Published online by Cambridge University Press:  26 February 2011

A. Madan ,
S. Kuhl  and
B. Von Roedern
A. Madan
Affiliation:
Glasstech Solar, Inc., (GSI), 12441 West 49th Avenue, Wheatridge, Colorado 80033, U.S.A.
S. Kuhl
Affiliation:
Glasstech Solar, Inc., (GSI), 12441 West 49th Avenue, Wheatridge, Colorado 80033, U.S.A.
B. Von Roedern
Affiliation:
Glasstech Solar, Inc., (GSI), 12441 West 49th Avenue, Wheatridge, Colorado 80033, U.S.A.
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Abstract

We present data of materials and devices produced from GSI's continuous mass production system for large area solar cells. We also discuss our recent development of a multichamber system which is capable of producing uniform a-Si:H layers over areas of 2 m2.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 118: Symposium E – Amorphous Silicon Technology , 1988 , 587
Copyright
Copyright © Materials Research Society 1988

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References

1) Madan, A., Amorphous Silicon Subcontractors Meeting, Palo Alto, CA, (1987), 307.Google Scholar
2) Von Roedern, B., Madan, A., Solar Today, (May/June, 1987), 16.Google Scholar
3) Madan, A., von Roedern, B. and Muhl, S., 7th International Conference on Thin Films, New Delhi, India, 1987.Google Scholar
4) Delahoy, A.E. and Griffith, R.W., J. Appl. Phys. (1981), 52, 6337.Google Scholar