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Comparative Discharge Diagnostic Study of Silane, Disilane, and Germane RF Discharges Using Optical Emission Spectroscopy and Mass Spectrometry

Published online by Cambridge University Press:  26 February 2011

H. Chatham  and
P. K. Bhat
H. Chatham
Affiliation:
Glasstech Solar, Inc., (GSI) 12441 West 49th Avenue, Wheatridge, Colorado 80033 U.S.A.
P. K. Bhat
Affiliation:
Glasstech Solar, Inc., (GSI) 12441 West 49th Avenue, Wheatridge, Colorado 80033 U.S.A.
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Abstract

Measurements of the depletions of the feedstock gases in monosilane-germane and disilane-germane rf discharges indicate that the dissociation rates of germane and monosilane differ by a factor of 2 whereas the dissociation rates of germane and disilane differ by a factor of 0.8. As a result, larger germane concentrations are required in disilane-germane than in monosilane-germane discharges in order to achieve equal germanium content in the resulting films.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 118: Symposium E – Amorphous Silicon Technology , 1988 , 31
Copyright
Copyright © Materials Research Society 1988

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