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Chemical Nano-tomography of Self-assembled Ge-Si:Si(001) Islands from Quantitative High Resolution Transmission Electron Microscopy

Published online by Cambridge University Press:  31 January 2011

Luciano Andrey Montoro ,
Marina Leite ,
Daniel Biggemann ,
Fellipe Grillo Peternella ,
Kees Joost Batenburg ,
Gilberto Medeiros-Ribeiro  and
Antonio J. Ramirez
Luciano Andrey Montoro
Affiliation:
[email protected], Brazilian Synchrotron Light Laboratory, Av. Giuseppe Maximo Scolfaro, 10000, Campinas, 13083970, Brazil
Marina Leite
Affiliation:
[email protected], Brazilian Synchrotron Light Laboratory, Campinas, Brazil
Daniel Biggemann
Affiliation:
[email protected], Brazilian Synchrotron Light Laboratory, Campinas, Brazil
Fellipe Grillo Peternella
Affiliation:
[email protected], Brazilian Synchrotron Light Laboratory, Campinas, Brazil
Kees Joost Batenburg
Affiliation:
[email protected], University of Antwerp, Vision Lab, Wilrijk, Belgium
Gilberto Medeiros-Ribeiro
Affiliation:
[email protected], Brazilian Synchrotron Light Laboratory, Campinas, Brazil
Antonio J. Ramirez
Affiliation:
[email protected], Brazilian Synchrotron Light Laboratory, Campinas, Brazil
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Abstract

The knowledge of composition and strain with high spatial resolution is highly important for the understanding of the chemical and electronic properties of alloyed nanostructures. Several applications require a precise knowledge of both composition and strain, which can only be extracted by self-consistent methodologies. Here, we demonstrate the use of a quantitative high resolution transmission electron microscopy (QHRTEM) technique to obtain two-dimensional (2D) projected chemical maps of epitaxially grown Ge-Si:Si(001) islands, with high spatial resolution, at different crystallographic orientations. By a combination of these data with an iterative simulation, it was possible infer the three-dimensional (3D) chemical arrangement on the strained Ge-Si:Si(001) islands, showing a four-fold chemical distribution which follows the nanocrystal shape/symmetry. This methodology can be applied for a large variety of strained crystalline systems, such as nanowires, epitaxial islands, quantum dots and wells, and partially relaxed heterostructures.

Keywords

transmission electron microscopy (TEM)chemical compositionnanostructure
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1184: Symposium GG – Electron Crystallography for Materials Research and Quantitive Characterization of Nanostructured Materials , 2009 , 1184-HH01-09
Copyright
Copyright © Materials Research Society 2009

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