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Seebeck Coefficient of Nanolayer Growth of Anatase TiO2-x/Al-foil by Atomic Layer Deposition

Published online by Cambridge University Press:  18 April 2013

Matthew Chamberlin ,
Renee E. Ahern  and
Costel Constantin
Matthew Chamberlin
Affiliation:
Department of Physics and Astronomy, James Madison University, Harrisonburg, VA 22807
Renee E. Ahern
Affiliation:
Department of Physics and Astronomy, James Madison University, Harrisonburg, VA 22807
Costel Constantin
Affiliation:
Department of Physics and Astronomy, James Madison University, Harrisonburg, VA 22807
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Abstract

Non-stoichiometric and impurity doped titanium dioxide materials are good candidates for use in high temperature thermoelectric devices. Nanolayers of non-stoichiometric (TiO2-x) thin films were deposited on Al-foil by atomic layer deposition growth method. X-ray diffraction experiments showed anatase phase for these nanolayers. This crystal structure was maintained even after an annealing treatment of 600 °C for 60 minutes under an O2 pressure of ∼ 10 psi. This investigation presents for the first time how Al-foil can be functionalized by manipulating the Seebeck coefficient of these TiO2-x nanolayers.

Keywords

ceramicthermoelectricenergy generation
Type
Articles
Information
MRS Online Proceedings Library (OPL) , Volume 1494: Symposium F – Oxide Semiconductors and Thin Films , 2013 , pp. 271 - 275
Copyright
Copyright © Materials Research Society 2013 

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