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Rapid Formation of Beryllium Nitride and Beryllium Oxide by Excimer Laser Irradiation of Samples Immersed in Liquids

Published online by Cambridge University Press:  28 February 2011

D. Dijkkamp ,
X. D. Wu ,
Siu-Wai Chan  and
T. Venkatesan
D. Dijkkamp
Affiliation:
Bell Communications Research, Red Bank, NJ 07701
X. D. Wu
Affiliation:
Physics Department, Rutgers University, Piscataway, NJ 08854
Siu-Wai Chan
Affiliation:
Bell Communications Research, Red Bank, NJ 07701
T. Venkatesan
Affiliation:
Bell Communications Research, Red Bank, NJ 07701
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Abstract

Excimer laser induced rapid formation of nitride and oxide layers on beryllium samples immersed in liquid nitrogen and water, resp., has been studied. From Rutherford backscattering spectra the amounts of incorporated nitrogen and oxygen were determined. In addition, scanning electron microscopy was used to study the morphology of the irradiated surface and compound formation was confirmed by X-ray diffraction. Our results show that extremely rapid reaction takes place when the laser energy is sufficient to melt the beryllium surface. The amount of reaction is found to be proportional to both the energy density and the number of laser shots, until a nearly stoichiometric layer of Be3N2 or BeO is formed at the surface, at which point the reaction saturates. Growth rates on the order 20 nm per shot are deduced from the data, which is orders of magnitude higher than those achieved by conventional means.

Type
Articles
Information
MRS Online Proceedings Library (OPL) , Volume 75: Symposium B – Photon, Beam, and Plasma Stimulated Chemical Processes at Surfaces , 1986 , 303
Copyright
Copyright © Materials Research Society 1987

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