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Pulsed Laser Deposition of Piezoelectric Films for Micro-Fluidic Applications

Published online by Cambridge University Press:  10 February 2011

W.J. Kim ,
J.C. Rife ,
J.S. Horwitz ,
R.C.Y. Auyeung ,
D.B. Chrisey ,
M.I. Bell  and
R.W. Smith
W.J. Kim
Affiliation:
SFA Inc., 1401 McCormick Dr., Largo, MD 20774, [email protected]
J.C. Rife
Affiliation:
Naval Research Laboratory, 4555 Overlook Ave., Washington DC 20375
J.S. Horwitz
Affiliation:
Naval Research Laboratory, 4555 Overlook Ave., Washington DC 20375
R.C.Y. Auyeung
Affiliation:
SFA Inc., 1401 McCormick Dr., Largo, MD 20774, [email protected]
D.B. Chrisey
Affiliation:
Naval Research Laboratory, 4555 Overlook Ave., Washington DC 20375
M.I. Bell
Affiliation:
Naval Research Laboratory, 4555 Overlook Ave., Washington DC 20375
R.W. Smith
Affiliation:
Department of Chemistry, University of Nebraska, Omaha, NE
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Abtract

Thick films of piezoelectric materials have been grown by pulsed laser deposition (PLD) for use in the development of a programmable micro-fluidic controller. ZnO and BaTiO3 (BTO) films were deposited onto various substrates, including Au/Cr coated Si, Pt/Ti coated Si, and Au/Pd coated glass microchannel plates, at substrate temperatures from room temperature to 800 °C in a background pressure of O2 from 3 to 350 mTorr. ZnO films (∼5 µm thick) were single phase and (001) oriented. BTO films, 33 µm thick, on Pt/Ti/Si were single phase and polycrystalline. To fabricate piezoelectric acoustic transducer, an array of 2 × 4 gold electrodes was deposited onto the thick BTO films through a shadow mask by PLD. The transducers were attached to a simple fluidic circuit with a 1.6 × 1.6 mm cross section and used to generate a flow velocity of 1 mm/s at an operating frequency of 50 MHz.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 541: Symposium O – Ferroelectric Thin Films VII , 1998 , 635
Copyright
Copyright © Materials Research Society 1999

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References

REFERENCES

1. Micro Total Analysis System '98 edited by Harrison, D.J., and Berg, A. van den, Kluwer, Dordrecht (1998).Google Scholar
2. Microreaction Technology edited by Erfeld, W., Springer, Berlin (1998).Google Scholar
3. Adamson, A.W., Physical Properties of Surfaces, pp. 219–223, John Wiley & Sons, Inc., New York (1990).Google Scholar
4. Fan, A.H., and Harrison, D.J., Anal. Chem. 66, p. 177 (1994).Google Scholar
5. Rife, J.C. and Bell, M.I., Proceeding of SPIE 3515, p. 125 (1998).Google Scholar
6. Pulsed Laser Deposition of Thin Films edited by Chrisey, D.B., and Hubklr, G.K., John Wiley & Sons, Inc., New York (1994).Google Scholar
7 Lines, M.E., and Glass, A.M., principles and Applications of Ferroelectrics and Related Materials, Chap. 5, Clarendon Press, Oxford (1977).Google Scholar
8. Yano, Y., Iijima, K., Daitoh, Y., Terashima, T., Bando, Y., Watanabe, Y., Kasatani, H., and Terauchi, H., J. Appl. Phys. 76, p. 7833 (1994).Google Scholar
9. Terauchi, H., Watanabe, Y., Kasatani, H., Kamigaki, K., Yano, Y., Terashima, T., and Bando, Y., J. Phys. Soc. Jap. 61, p. 2194 (1992).Google Scholar
10. Horwitz, J.S., Chang, W., Carter, A.C., Pond, J.M., Kirchoefer, S.W., Chrisey, D.B., Levy, J. and Hubert, C., Integrated Ferroelectronics 22, p. 279 (1998).Google Scholar
11. Terauchi, H., watanabe, Y., Kasatani, H., Kamigaki, K.. Yano, Y., Terashima, T., and Bando, Y., J. Phys. Soc. Jap. 61, p. 2194 (1992).Google Scholar
12. Rife, J.C., Bell, M.I., Horwitz, J.S., Kabler, M.N., Auyeung, R.C.Y. and Kim, W.J., Sensors and Actuators A, submitted (1998).Google Scholar