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Low Temperature Deposition of Hard, Amorphous Diamondlike Films by Laser Evaporation
Published online by Cambridge University Press: 25 February 2011
Abstract
Substrate temperature during deposition of hard carbon films by short pulse (40 nsec, FWHM) eximer (308 nm) laser ablation (∼1.25 × 108 W/cm2) of solid carbon affects the optical and mechnical properties of deposited films. Films deposited at 25° C are superior to those deposited at 500° C. Deposited films were charaterized by spectroscopic ellipsometry, microhardness, TEM, Raman and FT-IR techniques.
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