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Ferroelectric Thin Films for Microactuator Applications
Published online by Cambridge University Press: 25 February 2011
Abstract
Ferroelectric thin films of PZT and PMN-PT were fabricated by the solgel spin-on technique. The films show high dielectric constants, polarization and breakdown strength values. Using a laser interferometer (ultradilatometer), the piezoelectric and electrostrictive coefficients of the films were measured. The results indicate that the sol-gel derived ferroelectric thin films have good electromechanical properties and can be used in rnicroactuator applications.
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- Copyright © Materials Research Society 1992
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