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Development of Hybrid MEMS/FIB Processes and Applications of Three-pronged Active Nanotweezers For Manipulation of Nano Objects

Published online by Cambridge University Press:  26 February 2011

Xuefeng Wang  and
Chang Liu
Xuefeng Wang
Affiliation:
[email protected] of IllinoisMicro and Nanotechnology Laboratory208 North Wright Street Urbana IL 61801United States
Chang Liu
Affiliation:
[email protected], University of Illinois at Urbana-Champaign, Micro and Nanotechnology Laboratory, 208 North Wright Street, Urbana, IL, 61801, United States
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Abstract

We report recent development of a three-probe micromachined nanomanipulator for manipulation and in-situ characterization of nanomaterials in scanning electron microscope (SEM). The nanomanipulator consists of three independent probes having thermal bimetallic actuators and nanoscopic end-effectors. Nanoscale end-effectors with sub-100-nm spacing are created using focused ion beam (FIB) milling to directly interface with nanoscopic objects (e.g., nanotubes, nanowires). Handling of individual carbon nanotubes (CNTs) was successfully realized with the nanomanipulator in an SEM.

Keywords

nanoscalemachiningnanostructure
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 983: Symposium LL – Focused Ion Beams for Analysis and Processing , 2006 , 0983-LL08-09
Copyright
Copyright © Materials Research Society 2007

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