Hostname: page-component-586b7cd67f-2plfb Total loading time: 0 Render date: 2024-11-28T06:36:17.027Z Has data issue: false hasContentIssue false
  • English
  • Français

Composite Contacts in Microsystems: Fabrication of Metal-Nanostructured Titania Nanocomposites

Published online by Cambridge University Press:  01 February 2011

Abu Samah Zuruzi ,
Marcus S. Ward ,
Chang Song Ding  and
Noel C. MacDonald
Abu Samah Zuruzi
Affiliation:
Materials Department, University of California, Santa Barbara, CA 93106, USA.
Marcus S. Ward
Affiliation:
Materials Department, University of California, Santa Barbara, CA 93106, USA.
Chang Song Ding
Affiliation:
Mechanical and Environmental Engineering Department, University of California, Santa Barbara, CA 93106, USA.
Noel C. MacDonald
Affiliation:
Materials Department, University of California, Santa Barbara, CA 93106, USA. Mechanical and Environmental Engineering Department, University of California, Santa Barbara, CA 93106, USA.
Get access

Abstract

Integrated micrometer scale interpenetrating Au-Nanostructured TiO2 (NST) network nanocomposites have been fabricated using a two step process. First, NST pad arrays were prepared by reacting Ti surfaces, patterned with an SiO2 masking layer, with aqueous H2O2. NST formed is porous with pores 50 to 200 nm in diameter and walls about 75 to 125 nm thick. Second, Au was infiltrated into pores of NST using electroless deposition to form the nanocomposite. SEM studies indicate that Au was deposited into pores of NST with little void formation. Selective deposition of Au on NST pads was confirmed using XRD and area-mode XPS. This process is a general route to forming micrometer-scale nanocomposite features consisting of NST and metals that are amenable to electroless deposition.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 872: Symposium J – Micro- and Nanosystems—Materials and Devices , 2005 , J18.21
Copyright
Copyright © Materials Research Society 2005

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

[1] Roy, R, Roy, R A and Roy, D M 1986 Materials Letters 4 323 Google Scholar
[2] Clarke, D R 1992 Journal of the American Ceramic Society 75 739 Google Scholar
[3] Decker, C 2002 Macromolecular Rapid Communications 23 1067 Google Scholar
[4] Sharp, K G 1998 Advanced Materials 10 1243 Google Scholar
[5] Breslin, M C, Ringnalda, J, Xu, L, Fuller, M, Seeger, J, Daehn, G S, Otani, T and Fraser, T L 1995 Materials Science and Engineering A195 113 Google Scholar
[6] Hyman, D and Mehregany, M 1999 IEEE Transactions on Components and Packaging Technology 22 357 Google Scholar
[7] Coutu, J R, Kladitis, P E, Leedy, K D and Crane, R L 2004 Journal of Micromechanics and Microengineering 14 1157 Google Scholar
[8] Zhang, W G, Liu, W M, Li, B, Mai, G X 2002 Journal of the American Ceramic Society 85 1770 Google Scholar
[9] Tengvall, P, Lundstrom, I, Sjoqvist, L, Elwing, H and Bjurstein, L M 1989 Biomaterials 10 166 Google Scholar
[10] Bearinger, J P, Orme, C A and Gilbert, J L 2001 Surface Science 491 370 Google Scholar
[11] Wu, J M, Hayakawa, S, Tsuru, K and Osaka, A 2002 Scripta Materialia 46 101 Google Scholar
[12] Zuruzi, A S and MacDonald, N C 2005 Advanced Functional Materials 15 396 Google Scholar
[13] Hou, Z Z, Abbott, N L and Stroeve, P 1998 Langmuir 14 3287 Google Scholar
[14] Fuggle, J C, Kallne, E, Watson, L M and Fabian, D J 1977 Physical Review B 16 750 Google Scholar
[15] Turner, N H and Single, A M 1990 Surface and Interface Analysis 15 215 Google Scholar
[16] Thomas, T D and Weightman, P 1986 Physical Review B 33 5406 Google Scholar
[17] Chen H-, I, Hsiung C-, K and Chou Y-, I 2003 Semiconductor Science and Technology 18 620 Google Scholar
[18] Solomun, T 1995 Surface Science 331-333 52 Google Scholar
[19] Moulder, J F, Stickle, W F, Sobol, P E and Bomben, K D Handbook of X-Ray Photoelectron Spectroscopy: A Reference Book of Standard Spectra for Identification and Interpretation of XPS Data 1995 (Minnesota: Physical Electronics Inc.)Google Scholar