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Characterization of TFT-LCD and OLEDs Devices by Phase Modulated Spectroscopic Ellipsometry for Display Applications

Published online by Cambridge University Press:  26 February 2011

Eric Teboul ,
Li Yan  and
Melanie Gaillet
Eric Teboul
Affiliation:
[email protected], ., ., ., ., CA, ., United States
Li Yan
Affiliation:
[email protected], HORIBA Jobin Yvon, Thin Film Division, 3880 Park Avenue, Edison, NJ, 08820, United States
Melanie Gaillet
Affiliation:
[email protected], HORIBA Jobin Yvon, Thin Film Division, 5 Avenue Arago, Chilly-Mazarin, 91380, France
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Abstract

Spectroscopic ellipsometry is one of the most accurate and reliable optical technique to characterize polymers, liquid crystals (LCs) and organic light emitting diodes (OLEDs). Because these devices are formed by complex structure including optical anisotropy, absorbing and graded materials, the correct use of spectroscopic ellipsometer required a combination of the proper choice of hardware and the appropriate ellipsometric model. In this work, we presents ellipsometric results obtained by a commercially available phase modulated spectroscopic ellipsometer (PMSE) on a full TFT-LCD structure characterized from UV to NIR. As expected, strong anisotropy and inhomogeneous optical properties were found respectively on LCs and ITO materials. We also presents measurements of film thickness and optical constants of each layer constituing an OLED structure

Keywords

thin filmoptical propertiesorganic
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 965: Symposium S – Organic Electronics – Materials, Devices and Applications , 2006 , 0965-S03-07
Copyright
Copyright © Materials Research Society 2007

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References

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