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Advanced microelectromechanical systems-based nanomechanical testing: Beyond stress and strain measurements

Published online by Cambridge University Press:  11 June 2019

Sanjit Bhowmick ,
Horacio Espinosa ,
Katherine Jungjohann ,
Thomas Pardoen  and
Olivier Pierron
Sanjit Bhowmick
Affiliation:
Bruker Nano Inc., USA; [email protected]
Horacio Espinosa
Affiliation:
McCormick School of Engineering and Applied Sciences, Northwestern University, USA; [email protected]
Katherine Jungjohann
Affiliation:
Center for Integrated Nanotechnologies, USA; [email protected]
Thomas Pardoen
Affiliation:
Institute of Mechanics, Materials and Civil Engineering, Universite Catholique de Louvain, Belgium; [email protected]
Olivier Pierron
Affiliation:
Woodruff School of Mechanical Engineering, Georgia Institute of Technology, USA; [email protected]
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Abstract

The field of in situ nanomechanics is greatly benefiting from microelectromechanical systems (MEMS) technology and integrated microscale testing machines that can measure a wide range of mechanical properties at nanometer scales, while characterizing the damage or microstructure evolution in electron microscopes. This article focuses on the latest advances in MEMS-based nanomechanical testing techniques that go beyond stress and strain measurements under typical monotonic loadings. Specifically, recent advances in MEMS testing machines now enable probing key mechanical properties of nanomaterials related to fracture, fatigue, and wear. Tensile properties can be measured without instabilities or at high strain rates, and signature parameters such as activation volume can be obtained. Opportunities for environmental in situ nanomechanics enabled by MEMS technology are also discussed.

Keywords

microelectro-mechanical (MEMS)transmission electron microscopy (TEM)fatiguefracturetribologystrength
Type
Advances in In situ Nanomechanical Testing
Information
MRS Bulletin , Volume 44 , Issue 6: Advances in In situ Nanomechanical Testing , June 2019 , pp. 487 - 493
Copyright
Copyright © Materials Research Society 2019 

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