With offices and distribution partners on every continent and a history of unrivaled AFM product innovation, Park Systems is a premier global AFM technology solution provider.
Park Systems offers the broadest line of AFM from research grade to fully automated for researchers and industry engineers in the chemistry, materials, physics, life sciences, and semiconductor and data storage industries. Park’s wide range of AFM products are used for research at virtually all major universities and national labs and semiconductor companies world-wide have partnered with Park Systems to fulfill their nanoscale microscopy needs, including the top five manufacturers.
Park Systems has remained the leading innovator in nanoscale microscopy and metrology throughout its long history and continues to invest in the development of new emerging technologies. Products from Park Systems are used by some of the most notable researchers and corporations across the globe and are valued for their many unique and patented AFM designs.
Atomic Force Microscope Products
Park FX40—The first AFM to automatically execute all up-front set up and scanning processes, putting the intelligent Park FX40 in a groundbreaking new class of atomic force microscope. FX40 is infused with innovative robotics, intelligent learning features, safety mechanisms, AI based software and specialized add-ons. Park FX40 takes care of all the set up before and during scanning: the probe exchange, probe identification, beam alignment, sample location, tip approach and imaging optimization. It is an overhaul in functionality while retaining the same basic design elements, enabling AFM’s to think and perform essential functions completely on their own. See more on Park FX 40 at: www.parksystems.com/fx40.
Park NX10—The easiest to use and most accurate AFM with Accurate XY Scan by Crosstalk Elimination, Accurate AFM Topography with Low Noise Z Detector, Best Tip Life, Resolution and Sample Preservation by True Non-Contact™ Mode and Park SmartScan™ - AFM operating software versatile enough to empower both novices and power users alike toward great nanoscale research. Park NX10 provides accurate measurement at highest nanoscale resolution than any other products in its class. It allows you to obtain sample images and its characteristic measurements true to its nano structure thanks to its flat, orthogonal, and linear scan measurements by its unique AFM architecture: independent XY and Z, flexure based scans. Park’s unique True Non-Contact™ mode provides you with the sharpest images, scan after scan without declining resolution.
Park NX20—The leading nano metrology tool for failure analysis and large sample research. Designed for quality assurance and failure analysis in the hard disk drive and semiconductor industries, the NX20 stands out for its unmatched non-contact mode that guarantees long-running probe tip sharpness. Park NX20 system can inspect an entire 300 mm wafer efficiently, without any need for cumbersome sample displacement.
NX-Hivac—Park NX-Hivac allows failure analysis engineers to improve the sensitivity and resolution of their measurements through high vacuum SSRM. Because high vacuum scanning offers greater accuracy, better repeatability, and less tip and sample damage than ambient or dry N2 conditions, users can measure a wide range of dope concentration and signal response in failure analysis applications. The NX-Hivac lets you scan a sample in just five steps: Scan, lift cantilever, move motorized stage to user defined coordinate, approach, and repeat. This boosts productivity enormously and reduces required user input to the absolute minimum.
Park NX-Wafer—Designed specifically for the semiconductor industry, NX Wafer is the most advanced defect review solution available, featuring automatic target positioning without the need for labor intensive reference marks that often damage the sample. The Smart ADR process improves productivity by up to 1,000% compared to traditional defect review methods. Additionally, the new ADR capability offers up to 20x longer tip life thanks to Park’s groundbreaking True Non-Contact™ Mode AFM technology.
Park Systems is the fastest growing and world-leading manufacturer of atomic force microscopy (AFM) systems, with a complete range of products for researchers and engineers in the chemistry, materials, physics, life sciences, semiconductor and data storage industries. Our mission is to enable nanoscale advances for scientists and engineers solving the world’s most pressing problems and pushing the boundaries of scientific discoveries and engineering innovations. Customers of Park Systems include most of the world’s top 20 largest semiconductor companies and national research universities in Asia, Europe and the Americas. Park Systems is a publicly traded corporation on the Korea Stock Exchange (KOSDAQ) with corporate headquarters in Suwon, Korea, and regional headquarters in Santa Clara, California(USA), Mannheim (Germany), Paris (France), Nottingham(UK), Tokyo (Japan), Beijing & Shanghai (China), Hsinchu (Taiwan), Singapore(Singapore), Bangalore(India), and Mexico City (Mexico). To learn more about Park Systems, please visit www.parksystems.com or contact us at [email protected].
How to find us
Park Systems Corp.
KANC 15F, Gwanggyo-ro 109, Suwon 16229, Korea
Tel : +82-31-546-6800
Fax : +82-31-546-6805
