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EDS Spectral Artifacts / Sum Peaks: A Reminder

Published online by Cambridge University Press:  14 March 2018

Steven S. Hurban
Steven S. Hurban*
Affiliation:
Endicott Interconnect Technologies, Inc. Failure Analysis Laboratory, Endicott, NY
*
[email protected]

Abstract

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Type
Microscopy 101
Information
Microscopy Today , Volume 11 , Issue 3 , June 2003 , pp. 43
Copyright
Copyright © Microscopy Society of America 2003

References

1) Goldstein, J.I., Newbury, D.E., Echlin, P., Joy, D.C., Fiori, C., Lifshin, E., Scanning Electron Microscopy and Microanalysis, New York, Plenum Press (1992) 275—292 CrossRefGoogle Scholar
2) Goldstein, J.I., Newbury, D.E., Echlin, P., Joy, D.C., Ron, C., Lifshin, E., Scanning Electron Microscopy and Micro ana lysis, New York, Plenum Press (1992) 226–241 Google Scholar
3) Fiori, C.E., Newbury, D.E., R.L. Myklebust, Artifacts Observed in Energy Dispersive X-Ray Spectrometry in Electron Beam Instruments - A Cautionary Guide, NBS Special Publication 604 (1981) 315-333.Google Scholar