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Crystal Scanner for Nano-Metrology Applications

Published online by Cambridge University Press:  14 March 2018

Paul West*
Affiliation:
Pacific Nanotechnology, Inc.
Zhiqiang Peng
Affiliation:
Pacific Nanotechnology, Inc.
Natalia Starostina
Affiliation:
Pacific Nanotechnology, Inc.

Extract

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Traditionally a scanning probe microscope (SPM), such as the atomic force microscope (AFM), affords spectacular images of surfaces at the nanometer scale. With advanced developments in scanner design, probe manufacturing and force sensor technology it is now possible to make quantitative metrological measurements with an SPM. Quantitative metrological measurements that are possible include: a) dimensional measurements of micro/nano fabricated structures, b) surface texture of surfaces having RMS values of only a few angstroms, and c) measurements of the number of grains, and particles on a surface as well as grain and particle sizes, areas, volumes, and distributions.

Type
Research Article
Copyright
Copyright © Microscopy Society of America 2005