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Correcting Scanning Errors in Scanning Probe Microscopes

Published online by Cambridge University Press:  14 March 2018

Gregor Hsiao  and
Jezz Leckenby
Gregor Hsiao
Affiliation:
ThermoMicroscopes, Sunnyvale, CA 94089
Jezz Leckenby
Affiliation:
ThermoMicroscopes, Sunnyvale, CA 94089

Extract

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Scanning probe microscopes (SPMs) are a family of instruments used for studying the surface properties of materials on a dimensional scale ranging from the atomic to the micrometer level. As depicted in Figure 1, all SPMs work by scanning a finely tipped probe in a raster pattern over the sample surface while measuring and mapping some interaction between the probe and the surface as a function of x-y position. The piezoelectric scanners used to provide the scanning motion offer very fine positional control but have certain inherent errors that, uncorrected, can distort images, introduce artifacts, and degrade measurement accuracy.

Type
Research Article
Information
Microscopy Today , Volume 7 , Issue 7 , September 1999 , pp. 10 - 13
Copyright
Copyright © Microscopy Society of America 1999

References

1) Howland, R. and Benatar, L., “A Practical Guide to Scanning Probe Microscopy,” Park Scientific Instruments (1997). Available from ThermoMicroscopes, Sunnyvale, CA 94089.Google Scholar
2) “Artifacts in SPM,” TopoMetrix (1993). Available from Thermo- Microscopes, Santa Clara, CA 95054.Google Scholar
3) ScanMaster™ US Patent 5,376,790, ThermoMicroscopes, Sunnyvale, CA.Google Scholar
4) TrueMetrix™ US Patent 5,469,734, ThermoMicroscopes, Sunnyvale, CA.Google Scholar