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X-ray spectral imaging in the STEM for microelectronics failure analysis

Published online by Cambridge University Press:  24 July 2003

P.G. Kotula  and
M.R. Keenan
P.G. Kotula
Affiliation:
Sandia National Laboratories, PO Box 5800, Albuquerque, NM 87185-0886
M.R. Keenan
Affiliation:
Sandia National Laboratories, PO Box 5800, Albuquerque, NM 87185-0886

Abstract

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Information
Microscopy and Microanalysis , Volume 9 , Issue S02 , August 2003 , pp. 998 - 999
Copyright
Copyright © Microscopy Society of America 2003