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X-ray Microanalysis of a Coated Nonconductive Specimen: Monte Carlo Simulation

Published online by Cambridge University Press:  01 December 2004

Hendrix Demers  and
Raynald Gauvin
Hendrix Demers
Affiliation:
Department of Mining, Metals and Materials Engineering, McGill University, Montréal H3A 2B2, Canada
Raynald Gauvin
Affiliation:
Department of Mining, Metals and Materials Engineering, McGill University, Montréal H3A 2B2, Canada
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Abstract

The microanalysis of nonconductive specimen in a scanning electron microscope is limited by charging effects. Using a charge density model for the electric field buildup in a nonconductive specimen irradiated by electrons, a Monte Carlo simulation method has been applied to alumina (Al2O3). The results show a change in the depth distribution for characteristic and bremsstrahlung X-ray, φ(ρz) curves, and ψ(ρz) curves (with absorption) for both elements' Kα lines. The influence of the electric field on the measured X-ray intensity is shown. The dependency of this influence by the three parameters, electron energy, X-ray energy, and charge density, is clarified.

Keywords

X-ray microanalysischargingnonconductive specimencoated specimenMonte Carlo calculationsscanning electron microscopyX-ray spectrum simulation
Type
Research Article
Information
Microscopy and Microanalysis , Volume 10 , Issue 6 , December 2004 , pp. 776 - 782
Copyright
© 2004 Microscopy Society of America

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References

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