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Xe+ FIB Milling and Measurement of Amorphous Damage in Diamond

Published online by Cambridge University Press:  25 July 2016

Brandon Van Leer ,
Ron Kelley ,
Arda Genc  and
Aleksei Savenko
Brandon Van Leer
Affiliation:
FEI Company, 5350 NW Dawson Creek Drive, Hillsboro, OR 97124USA
Ron Kelley
Affiliation:
FEI Company, 5350 NW Dawson Creek Drive, Hillsboro, OR 97124USA
Arda Genc
Affiliation:
FEI Company, 5350 NW Dawson Creek Drive, Hillsboro, OR 97124USA
Aleksei Savenko
Affiliation:
FEI Company, Achtseweg Noord 5, 5651 GG Eindhoven, The Netherlands

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 22 , Supplement S3: Proceedings of Microscopy & Microanalysis 2016 , July 2016 , pp. 178 - 179
Copyright
© Microscopy Society of America 2016 

References

References:

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