Hostname: page-component-586b7cd67f-t7fkt Total loading time: 0 Render date: 2024-11-29T14:43:22.817Z Has data issue: false hasContentIssue false
  • English
  • Français

When is Si3N4 not Si3N4? When it is a Low Stress SiNx Membrane Window

Published online by Cambridge University Press:  23 September 2015

Nestor J. Zaluzec
Nestor J. Zaluzec*
Affiliation:
Electron Microscopy Center, NST Div, Argonne National Laboratory, Argonne, Il, USA

Abstract

An abstract is not available for this content so a preview has been provided. As you have access to this content, a full PDF is available via the ‘Save PDF’ action button.
Image of the first page of this content. For PDF version, please use the ‘Save PDF’ preceeding this image.'
Type
Abstract
Information
Microscopy and Microanalysis , Volume 21 , Supplement S3: Proceedings of Microscopy & Microanalysis 2015 , August 2015 , pp. 959 - 960
Copyright
Copyright © Microscopy Society of America 2015 

References

[1] Research supported by the U.S. DoE, Office of Science, Office of Basic Energy Sciences, under Contract No. DE-AC02-06CH11357 at the Electron Microscopy Center , NST Division of ANL.Google Scholar