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Vacuum-Assisted Ex situ Lift Out for Plan View FIB Specimen Preparation

Published online by Cambridge University Press:  01 August 2018

Lisa Marie Lowery ,
Lucille A. Giannuzzi ,
Ping Lu ,
Paul G. Kotula  and
Joseph R. Michael
Lisa Marie Lowery
Affiliation:
Sandia National Laboratories, Materials Characterization, Albuquerque, NM.
Lucille A. Giannuzzi
Affiliation:
EXpressLO LLC, Lehigh Acres, FL.
Ping Lu
Affiliation:
Sandia National Laboratories, Materials Characterization, Albuquerque, NM.
Paul G. Kotula
Affiliation:
Sandia National Laboratories, Materials Characterization, Albuquerque, NM.
Joseph R. Michael
Affiliation:
Sandia National Laboratories, Materials Characterization, Albuquerque, NM.

Abstract

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Abstract
Information
Microscopy and Microanalysis , Volume 24 , Supplement S1: Proceedings of Microscopy & Microanalysis 2018 , August 2018 , pp. 832 - 833
Copyright
© Microscopy Society of America 2018 

References

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