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Twice Flipped - Avoiding Milling Curtains in FIB Prepared TEM Specimens of Nano-Electronics Devices

Published online by Cambridge University Press:  01 August 2010

J Gazda ,
J Duarte  and
F Daby-Merrill
J Gazda
Affiliation:
Cerium Laboratories
J Duarte
Affiliation:
Cerium Laboratories
F Daby-Merrill
Affiliation:
Cerium Laboratories

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2010 in Portland, Oregon, USA, August 1 – August 5, 2010.

Type
Abstract
Information
Microscopy and Microanalysis , Volume 16 , Supplement S2 , July 2010 , pp. 230 - 231
Copyright
Copyright © Microscopy Society of America 2010