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Tungsten Probe Tip Cleaning

Published online by Cambridge University Press:  30 July 2020

Jehan Saujauddin ,
Tim Niemi ,
Ted Lundquist ,
Baohua Niu  and
Michael Cable
Jehan Saujauddin
Affiliation:
Carl Zeiss SMT Inc., Pleasanton, California, United States
Tim Niemi
Affiliation:
Carl Zeiss SMT Inc., Pleasanton, California, United States
Ted Lundquist
Affiliation:
Carl Zeiss SMT Inc., Pleasanton, California, United States
Baohua Niu
Affiliation:
Carl Zeiss SMT Inc., Pleasanton, California, United States
Michael Cable
Affiliation:
XEI Scientific, Inc., Redwood City, California, United States

Abstract

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Type
Vendor Symposium
Information
Microscopy and Microanalysis , Volume 26 , Supplement S2 , August 2020 , pp. 2708 - 2709
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Copyright
Copyright © Microscopy Society of America 2020

References

Jehan Saujauddin, N., Chen, E.P.Y., Beaudoin, F, Nanoprobing Beyond 14nm with Latest Generation SEM-based Nano-probes, 43rd ASM-ISTFA 2017 Proceedings.Google Scholar
von Haartman, M., Rahman, S., Ganguly, S., Verma, J., Umair, A., Deborde, T., Optical Fault Isolation and Nanoprobing Techniques for the10 nm Technology Node and Beyond, 41st ASM-ISTFA 2015 Proceedings.Google Scholar
Qiu, A, Lowe, W, Arora, M, Nanoprobing on 7 nm FinFET Devices in an SRAM Array: Challenges and Solutions, 45th ASM-ISTFA 2019 Proceedings.Google Scholar