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Towards the Batch Production of 5 nm Focal Spot Size Zone Plates and Beyond

Published online by Cambridge University Press:  10 August 2018

Nicolaie Moldovan ,
Jonathan M. Logan  and
Ralu Divan
Nicolaie Moldovan*
Affiliation:
Alcorix Co., Plainfield, IL,
Jonathan M. Logan
Affiliation:
Alcorix Co., Plainfield, IL,
Ralu Divan
Affiliation:
Argonne National Laboratory, Center for Nanoscale Materials, Argonne, IL, USA
*
* Corresponding author, [email protected]

Abstract

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Abstract
Information
Microscopy and Microanalysis , Volume 24 , Supplement S2: Proceedings of the 14th International Conference on X-ray Microscopy (XRM2018) , August 2018 , pp. 276 - 277
Copyright
© Microscopy Society of America 2018 

References

[1] Koyama, T., et.al, Rev Sci Instr 83 2012) p. 013705.Google Scholar
[2] Meyer, M., et.al, J. Synchrotron Radiation 20 2013) p. 433.CrossRefGoogle Scholar
[3] Je, J. H. Jung, J. patent US 20130280421 A1, (2013).Google Scholar
[4] Doring, F., et.al, Optics Express 21(16 2013) p. 19311.Google Scholar
[5] This work was supported by the National Science Foundation under Grant No. 1648219. Any opinions, findings, and conclusions or recommendations expressed in this material are those of the authors and do not necessarily reflect the views of the National Science Foundation. Use of the Center for Nanoscale Materials, an Office of Science user facility, was supported by the U. S. Department of Energy, Office of Science, Office of Basic Energy Sciences, under Contract No. DE-AC02-06CH11357. Olga Makarova is thanked for contributions to the experimental work..Google Scholar