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Towards SIMS on the Helium Ion Microscope: Detection Limits and Experimental Results on the ORION

Published online by Cambridge University Press:  09 October 2013

D. Dowsett ,
L. Pillatsch ,
N. Vanhove ,
T. Wirtz ,
S. Sijbrandij  and
J. Notte
D. Dowsett
Affiliation:
L. Pillatsch
Affiliation:
N. Vanhove
Affiliation:
T. Wirtz
Affiliation:
S. Sijbrandij
Affiliation:
J. Notte
Affiliation:

Abstract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2013 in Indianapolis, Indiana, USA, August 4 – August 8, 2013.

Type
Abstract
Information
Microscopy and Microanalysis , Volume 19 , Issue S2: Proceedings of Microscopy & Microanalysis 2013 , August 2013 , pp. 354 - 355
Copyright
Copyright © Microscopy Society of America 2013