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Towards Quantitative Analysis of Nitrogen in Microelectronics Applications for Atom Probe Tomography

Published online by Cambridge University Press:  03 August 2008

RM Ulfig ,
TJ Prosa ,
DA Reinhard ,
E Oltman  and
RA Alvis
RM Ulfig
Affiliation:
Imago Scientific Instruments Corporation
TJ Prosa
Affiliation:
Imago Scientific Instruments Corporation
DA Reinhard
Affiliation:
Imago Scientific Instruments Corporation
E Oltman
Affiliation:
Imago Scientific Instruments Corporation
RA Alvis
Affiliation:
Imago Scientific Instruments Corporation
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Extract

Extended abstract of a paper presented at Microscopy and Microanalysis 2008 in Albuquerque, New Mexico, USA, August 3 – August 7, 2008

Type
Research Article
Information
Microscopy and Microanalysis , Volume 14 , Supplement S2 , August 2008 , pp. 1230 - 1231
Copyright
© 2008 Microscopy Society of America

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