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Towards a High-Brightness Electron Impact Ion Source for Nano-Applications

Published online by Cambridge University Press:  28 September 2015

Olivier De Castro ,
David Dowsett ,
Tom Wirtz  and
Serge Della Negra
Olivier De Castro
Affiliation:
Department “Science and Analysis of Materials“ (SAM), Centre de Recherche Public - Gabriel Lippmann, Belvaux, Luxembourg.
David Dowsett
Affiliation:
Department “Science and Analysis of Materials“ (SAM), Centre de Recherche Public - Gabriel Lippmann, Belvaux, Luxembourg.
Tom Wirtz
Affiliation:
Department “Science and Analysis of Materials“ (SAM), Centre de Recherche Public - Gabriel Lippmann, Belvaux, Luxembourg.
Serge Della Negra
Affiliation:
Institut de Physique Nucléaire Orsay (IPNO), Université Paris Sud, Orsay, France.

Abstract

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Type
Ion Optics
Information
Microscopy and Microanalysis , Volume 21 , Supplement S4: Proceedings Ninth International Conference on Charged Particle Optics , June 2015 , pp. 94 - 99
Copyright
Copyright © Microscopy Society of America 2015 

References

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