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Toward Automated S/TEM Metrology of Advanced CMOS Devices: Journey to Obtain a Precise and Accurate Measurement

Published online by Cambridge University Press:  04 August 2017

Weihao Weng ,
Haiyan Tan  and
Ahmad Katnani
Weihao Weng
Affiliation:
GLOBALFOUNDRIES, 2070 Route 52, Hopewell Junction, NY, USA
Haiyan Tan
Affiliation:
Thermo Fisher Scientific, 5350 NE Dawson Creek Drive, Hillsboro, OR, USA
Ahmad Katnani
Affiliation:
GLOBALFOUNDRIES, 2070 Route 52, Hopewell Junction, NY, USA

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 23 , Supplement S1: Proceedings of Microscopy & Microanalysis 2017 , July 2017 , pp. 1460 - 1461
Copyright
© Microscopy Society of America 2017 

References

[1] Thiel, B.L., et al, Conference Proceedings 1395(1 2011). p. 298.Google Scholar
[2] Acknowledgements: The authors thank Zhibin Ren (IBM assignee at GF) for providing test structures. The authors also thank Christopher Hakala (GF), Matthew Lamberti (GF), Raghaw Rai (GF), Frieder Baumann (GF), Taher Kagalwala (GF), Georgios Vakas (GF), Alok Vaid (GF), Eric Solecky (GF), Irene Brooks (GF), Laurent Dumas (GF), Edward Crawford (GF) and Paul Van Der Heide (GF) for valuable discussions. Furthermore the authors thank Gavin Dutrow (Thermo Fisher Scientific) and Mauricio Gordillo (Thermo Fisher Scientific) for assistance in recipe writing.Google Scholar