Hostname: page-component-586b7cd67f-l7hp2 Total loading time: 0 Render date: 2024-11-28T08:20:29.504Z Has data issue: false hasContentIssue false

Tomographic Spectral Imaging with a Dual-Beam FIB/SEM: 3D Microanalysis

Published online by Cambridge University Press:  01 August 2004

Paul G. Kotula
Affiliation:
Sandia National Laboratories, Albuquerque, New Mexico
Michael R. Keenan
Affiliation:
Sandia National Laboratories, Albuquerque, New Mexico
Joseph R. Michael
Affiliation:
Sandia National Laboratories, Albuquerque, New Mexico
Get access

Extract

Extended abstract of a paper presented at Microscopy and Microanalysis 2004 in Savannah, Georgia, USA, August 1–5, 2004.

Type
Research Article
Copyright
© 2004 Microscopy Society of America

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)