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Tip Shape Deconvolution of InSb / GaSb Ion Beam Assisted Etched Substrates by AFM

Published online by Cambridge University Press:  24 July 2003

M. Ospina ,
S. Vangala ,
W. D. Goodhue  and
C. Sung
M. Ospina
Affiliation:
Department of Chemical Engineering-Center for Advanced Materials
S. Vangala
Affiliation:
Department of Physics and Applied Physics-Photonics Center, University of Massachusetts, LowellMA 01854
W. D. Goodhue
Affiliation:
Department of Physics and Applied Physics-Photonics Center, University of Massachusetts, LowellMA 01854
C. Sung
Affiliation:
Department of Chemical Engineering-Center for Advanced Materials

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 9 , Issue S02 , August 2003 , pp. 1242 - 1243
Copyright
Copyright © Microscopy Society of America 2003