Three Dimensional Characterization of a Specific Site by an FIB Micro-Sampling Technique

Abstract

We have developed an FIB micro-sampling technique to prepare both plan view and cross-sectional TEM specimens from a specific site.

The instruments that were used in this study are the Hitachi FB-2000A FIB system equipped a with micromanipulator unit and an HF-2200 cold field emission 200kV analytical TEM equipped with a scanning attachment allowing both STEM and SEM imaging.

Figure 1 shows a procedure to prepare a micro-sample for either plan view or cross-sectional TEM observation of the specific site. First, the micro-sample for plan view TEM observation is trench milled by using an FIB(Figure 1a). Second, a tip of a micromanipulator W-probe is bonded to the micro-sample with the FIB assisted metal deposition. Then, the micro-sample is lifted out and transferred onto a micro-sample carrier(Figure 1b).