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Thickness Measurements of DLC Films by EELS and Electron Holography

Published online by Cambridge University Press:  02 July 2020

T. Musashi ,
Y. Ikematsu ,
D. Shindo ,
N. Nakamura  and
T. Oikawa
T. Musashi
Affiliation:
Institute for Advanced Materials Processing, Tohoku University, Sendai980-8577, Japan
Y. Ikematsu
Affiliation:
Institute for Advanced Materials Processing, Tohoku University, Sendai980-8577, Japan
D. Shindo
Affiliation:
Institute for Advanced Materials Processing, Tohoku University, Sendai980-8577, Japan
N. Nakamura
Affiliation:
Fujitsu Laboratories Ltd, Atsugi, Kanagawa243-0197, Japan
T. Oikawa
Affiliation:
JEOL Ltd, Akishima, Tokyo 196-0021, Japan
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Abstract

Diamond-like carbon (DLC) has been used as thin films to protect the surface of magnetic disks in hard disk drives. Recently, in order to improve the recording density of the hard disks, DLC films need to be thinner than 10 nm in thickness. Therefore, it is necessary to develop the accurate thickness measurement technique for thin DLC films. in this study, to establish the thickness measurement technique for DLC films using electron energy-loss spectroscopy (EELS) and electron holography, we estimate the mean free path for inelastic scattering (ƛp) and the mean inner potential (U0). Through the evaluation of ƛp and U0, we compare the accuracy of EELS and electron holography on thickness measurement of DLC films.

The DLC films in this study are deposited on silicon wafers by chemical vapor deposition (CVD), sputtering and ion beam deposition (IBD) methods.

Type
Thin Films & Coatings
Information
Microscopy and Microanalysis , Volume 7 , Issue S2: Proceedings: Microscopy & Microanalysis 2001, Microscopy Society of America 59th Annual Meeting, Microbeam Analysis Society 35th Annual Meeting, Long Beach, California August 5-9, 2001 , August 2001 , pp. 1230 - 1231
Copyright
Copyright © Microscopy Society of America 2001

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References

References:

1Egerton, R.F., Electron Energy-Loss Spectroscopy in the Electron Microscope, 2nd edition, New York, Plenum Press (1996) 302.CrossRefGoogle Scholar