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TEM Study of the Effect of the Sapphire Substrate Surface Orientation on the Microstructure of Tin Dioxide Films

Published online by Cambridge University Press:  02 July 2020

J. E. Dominguez ,
L. Fu  and
X. Q. Pan
J. E. Dominguez
Affiliation:
Dept. of Materials Science and Engineering, The University of Michigan, Ann Arbor, MI48109
L. Fu
Affiliation:
Dept. of Materials Science and Engineering, The University of Michigan, Ann Arbor, MI48109
X. Q. Pan
Affiliation:
Dept. of Materials Science and Engineering, The University of Michigan, Ann Arbor, MI48109
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Abstract

Tin dioxide (SnO2) has been extensively studied and used as gas sensors to detect toxic gases such as CO, NOxand flammable gases like H2.[l] Recently, considerable researches have focused on thin film sensors due to their high performance as well as their integration compatibility with semiconductor technology for making microsensors and sensor arrays. [2] The performance of thin film sensors is remarkably influenced by the way they were fabricated.[3] Among various deposition techniques, pulsed laser deposition (PLD) has shown great prominence in the deposition of a wide variety of oxide thin film materials such as high Tc superconductors, semiconductors and dielectrics. in this work we present our experimental results on tin dioxide films deposited using pulsed laser ablation on sapphire (α -Al2O3) substrates with different surface orientations.

Tin oxide films with a thickness of 100 nm were deposited on the (1012) and (0001) sapphire by pulsed laser ablation of ceramic SnO2 targets.

Type
Thin Films & Coatings
Information
Microscopy and Microanalysis , Volume 7 , Issue S2: Proceedings: Microscopy & Microanalysis 2001, Microscopy Society of America 59th Annual Meeting, Microbeam Analysis Society 35th Annual Meeting, Long Beach, California August 5-9, 2001 , August 2001 , pp. 1220 - 1221
Copyright
Copyright © Microscopy Society of America 2001

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References

[1] Demarne, V. and A. Grisel, , Sensors Act B, 7, 704 (1992)CrossRefGoogle Scholar

[2] Sberveglieri, G., Sensors Act B 23, 103 (1995)CrossRefGoogle Scholar

[3] Zhao, Y., Feng, Z. and Liang, Y., Sensors Act B, 224, 56 (1999)Google Scholar

[4] Mulheran, P. A. and Harding, J.H., Modelling Simul. Mater. Sci. Eng., 39,1(1992)Google Scholar