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TEM Study of the Damage Profiles induced by 14 keV P+ Implantation in Silicon and Germanium

Published online by Cambridge University Press:  05 August 2007

S Rubanov ,
D Jamieson ,
S Prawer ,
J McCallum  and
G Tamanyan
S Rubanov
Affiliation:
University of Melbourne,Australia
D Jamieson
Affiliation:
University of Melbourne,Australia
S Prawer
Affiliation:
University of Melbourne,Australia
J McCallum
Affiliation:
University of Melbourne,Australia
G Tamanyan
Affiliation:
University of Melbourne,Australia
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Extract

Extended abstract of a paper presented at Microscopy and Microanalysis 2007 in Ft. Lauderdale, Florida, USA, August 5 – August 9, 2007

Type
Research Article
Information
Microscopy and Microanalysis , Volume 13 , Issue S02 , August 2007 , pp. 654 - 655
Copyright
© 2007 Microscopy Society of America

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