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TEM Study of Aluminum Oxynitride Films Prepared by Reactive R.F.-Sputtering

Published online by Cambridge University Press:  08 April 2017

L-C Lai ,
M Nose ,
W-A Chiou  and
A Saiki
L-C Lai
Affiliation:
University of Maryland
M Nose
Affiliation:
University of Toyama, Japan
W-A Chiou
Affiliation:
University of Maryland
A Saiki
Affiliation:
University of Toyama, Japan

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2011 in Nashville, Tennessee, USA, August 7–August 11, 2011.

Type
Abstract
Information
Microscopy and Microanalysis , Volume 17 , Supplement S2 , July 2011 , pp. 1920 - 1921
Copyright
Copyright © Microscopy Society of America 2011