Hostname: page-component-586b7cd67f-r5fsc Total loading time: 0 Render date: 2024-11-26T01:50:56.214Z Has data issue: false hasContentIssue false
  • English
  • Français

TEM Study of AlN/Oxides (SiOx or AlxOy) Nanocomposite Films Prepared by a Differential Pumping Co-Sputtering System

Published online by Cambridge University Press:  23 November 2012

M. Nose ,
W. Chiou ,
H. Takabatake ,
T. Satho ,
T. Kawabata  and
K. Matsuda
M. Nose
Affiliation:
University of Toyama, Takaoka, Japan
W. Chiou
Affiliation:
NISP Lab, NanoCenter, University of Maryland, College Park, MD
H. Takabatake
Affiliation:
University of Toyama, Toyama, Japan
T. Satho
Affiliation:
University of Toyama, Toyama, Japan
T. Kawabata
Affiliation:
University of Toyama, Toyama, Japan
K. Matsuda
Affiliation:
University of Toyama, Toyama, Japan
Get access

Abstract

Extended abstract of a paper presented at Microscopy and Microanalysis 2012 in Phoenix, Arizona, USA, July 29 – August 2, 2012.

Type
Research Article
Information
Microscopy and Microanalysis , Volume 18 , Issue S2: Proceedings of Microscopy & Microanalysis 2012 , July 2012 , pp. 1696 - 1697
Copyright
Copyright © Microscopy Society of America 2012

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)