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TECNAI: the Concept for Modern TEM/STEM Analytical Systems

Published online by Cambridge University Press:  02 July 2020

K. Nadarzinski
K. Nadarzinski*
Affiliation:
Philips Electron Optics B.V., Achtseweg Noord 5, P.O. Box 218, 5600, MD, Eindhoven, The Netherlands
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Extract

Decreasing dimensions and the necessity to understand the structure and composition of materials or devices on a nanometer scale has led to new developments in TEM. Previously EDX analysis had been established as the only analytical technique. In recent years the analytical capabilities of TEM have been augmented with a number of analytical techniques - such as electron energy-loss spectroscopy (EELS), electron holography, Lorentz microscopy, high-angle annular dark-field (HAADF). These have been developed or extended to yet unavailable levels of resolution. The Schottky field-emitters provide stable, reliable, coherent and high-current electron sources that are needed to get the best out of the mentioned analytical techniques.

The development of these analytical capabilities has been a parallel process in many different places and mainly led to dedicated microscopes optimized for one purpose only. This made it almost impossible to get different sets of analytical information from one specimen area simultaneously, and often the data even had to be collected from different specimens.

Type
Advances in Instrumentation
Information
Microscopy and Microanalysis , Volume 5 , Issue S2: Proceedings: Microscopy & Microanalysis '99, Microscopy Society of America 57th Annual Meeting, Microbeam Analysis Society 33rd Annual Meeting, Portland, Oregon August 1-5, 1999 , August 1999 , pp. 342 - 343
Copyright
Copyright © Microscopy Society of America

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