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Superconducting Tunnel Junction Array Development for High-Resolution Energy-Dispersive X-ray Spectroscopy

Published online by Cambridge University Press:  28 July 2005

S. Friedrich
Affiliation:
Physics and Space Technology Directorate, Lawrence Livermore National Laboratory, P.O. Box 808, L-418, Livermore, CA 94550 Physical Biosciences Division, Lawrence Berkeley National Laboratory, MS 6-2100, Berkeley, CA 94720
C.A. Mears
Affiliation:
Physics and Space Technology Directorate, Lawrence Livermore National Laboratory, P.O. Box 808, L-418, Livermore, CA 94550
B. Nideröst
Affiliation:
Physics and Space Technology Directorate, Lawrence Livermore National Laboratory, P.O. Box 808, L-418, Livermore, CA 94550
L.J. Hiller
Affiliation:
Physics and Space Technology Directorate, Lawrence Livermore National Laboratory, P.O. Box 808, L-418, Livermore, CA 94550
M. Frank
Affiliation:
Physics and Space Technology Directorate, Lawrence Livermore National Laboratory, P.O. Box 808, L-418, Livermore, CA 94550
S.E. Labov
Affiliation:
Physics and Space Technology Directorate, Lawrence Livermore National Laboratory, P.O. Box 808, L-418, Livermore, CA 94550
A.T. Barfknecht
Affiliation:
Conductus Inc., 969 West Maude Avenue, Sunnyvale, CA 94086
S.P. Cramer
Affiliation:
Physical Biosciences Division, Lawrence Berkeley National Laboratory, MS 6-2100, Berkeley, CA 94720
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Abstract

Cryogenic energy-dispersive X-ray detectors are being developed because of their superior energy resolution (10 eV FWHM for keV X-rays) compared to that achieved in semiconductor energy-dispersive spectrometry (EDS) systems. So far, their range of application is limited because of their comparably small size and low count rate. We present data on the development of superconducting tunnel junction (STJ) detector arrays to address both of these issues. A single STJ detector has a resolution of around 10 eV below 1 keV and can be operated at count rates of the order 10,000 counts/sec. We show that the simultaneous operation of several STJ detectors does not dimish their energy resolution significantly, and it increases the detector area and the maximum count rate by a factor given by the total number of independent channels.

Type
1998 TOPICAL SYMPOSIUM OF THE MICROBEAM ANALYSIS SOCIETY
Copyright
© 2005 Microscopy Society of America

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