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Study of SEM images obtained with an electron energy and take-off angle (E-θ) selective detector

Published online by Cambridge University Press:  23 September 2015

Takeshi Otsuka ,
Motohiro Nakamura ,
Ken-ichi Yamashita ,
Masaya Hara ,
Felix Timischl ,
Kazuhiro Honda ,
Masato Kudo  and
Shin-ichi Kitamura
Takeshi Otsuka
Affiliation:
JEOL Ltd., 1-2 Musashino, 3-Chome, Akishima, Tokyo, 196-8558, Japan
Motohiro Nakamura
Affiliation:
JEOL Ltd., 1-2 Musashino, 3-Chome, Akishima, Tokyo, 196-8558, Japan
Ken-ichi Yamashita
Affiliation:
JEOL Ltd., 1-2 Musashino, 3-Chome, Akishima, Tokyo, 196-8558, Japan
Masaya Hara
Affiliation:
JEOL Ltd., 1-2 Musashino, 3-Chome, Akishima, Tokyo, 196-8558, Japan
Felix Timischl
Affiliation:
JEOL Technics Ltd., 6-38 Musashino 2-chome, Akishima, Tokyo, 196-0021, Japan
Kazuhiro Honda
Affiliation:
JEOL Ltd., 1-2 Musashino, 3-Chome, Akishima, Tokyo, 196-8558, Japan
Masato Kudo
Affiliation:
JEOL Technics Ltd., 6-38 Musashino 2-chome, Akishima, Tokyo, 196-0021, Japan
Shin-ichi Kitamura
Affiliation:
JEOL Ltd., 1-2 Musashino, 3-Chome, Akishima, Tokyo, 196-8558, Japan

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 21 , Supplement S3: Proceedings of Microscopy & Microanalysis 2015 , August 2015 , pp. 1693 - 1694
Copyright
Copyright © Microscopy Society of America 2015 

References

References:

[1] Otsuka, T., et al, Microscopy and Microanalysis (2014). p 36.CrossRefGoogle Scholar