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Study of Direct Lithiation of Thin Si Membranes with Spatially-Correlative Low Energy Focused Li Ion Beam and Analytical Electron Microscopy Techniques

Published online by Cambridge University Press:  25 July 2016

V.P. Oleshko ,
K.A. Twedt ,
C.L. Soles  and
J.J. McClelland
V.P. Oleshko
Affiliation:
Material Measurement Laboratory and
K.A. Twedt
Affiliation:
Center for Nanoscale Science and Technology, National Institute of Standards and Technology, Gaithersburg, MD 20899 Maryland Nanocenter, University of Maryland, College Park, MD 20742
C.L. Soles
Affiliation:
Material Measurement Laboratory and
J.J. McClelland
Affiliation:
Center for Nanoscale Science and Technology, National Institute of Standards and Technology, Gaithersburg, MD 20899

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 22 , Supplement S3: Proceedings of Microscopy & Microanalysis 2016 , July 2016 , pp. 1556 - 1557
Copyright
© Microscopy Society of America 2016 

References

[1] Kim, H., et al, J. Phys. Chem. C 114 (2010) 17942.Google Scholar
[2] Oliviero, E., et al, J. Appl. Phys. 113 (2013) 083515.CrossRefGoogle Scholar
[3] Oleshko, V.P., et al, Microsc. Microanal. 20(Suppl 3 (2014) 426.Google Scholar
[4] Oleshko, V.P., et al, Nanoscale 6 (2014) 11756.Google Scholar
[5] Twedt, K. A., et al, Ultramicroscopy 142 (2014) 24.Google Scholar