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Strategies for Low Accelerating Voltage X-ray Microanalysis of Sub-Micrometer Features with the FE-EPMA

Published online by Cambridge University Press:  27 August 2014

Peter McSwiggen ,
John T. Armstrong  and
Charles Nielsen
Peter McSwiggen
Affiliation:
McSwiggen & Associates / JEOL USA, Inc., St. Anthony, MN, U.S.A.
John T. Armstrong
Affiliation:
Geophysical Laboratory, Carnegie Inst. of Washington, Washington, DC, U.S.A.
Charles Nielsen
Affiliation:
JEOL USA, Inc., Peabody, MA, U.S.A.

Abstract

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Information
Microscopy and Microanalysis , Volume 20 , Supplement S3: Proceedings of Microscopy & Microanalysis 2014 , August 2014 , pp. 688 - 689
Copyright
Copyright © Microscopy Society of America 2014