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Strain Analysis of Semiconductor Device by Moiré Fringes in STEM Image

Published online by Cambridge University Press:  09 October 2013

N. Endo  and
Y. Kondo
N. Endo
Affiliation:
Y. Kondo
Affiliation:

Abstract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2013 in Indianapolis, Indiana, USA, August 4 – August 8, 2013.

Type
Abstract
Information
Microscopy and Microanalysis , Volume 19 , Issue S2: Proceedings of Microscopy & Microanalysis 2013 , August 2013 , pp. 346 - 347
Copyright
Copyright © Microscopy Society of America 2013