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STEM Scanning Mode Observation of Semiconductor Devices

Published online by Cambridge University Press:  22 July 2003

Nathan Wang ,
Jin Wu ,
Judy Tseng ,
George Ji  and
Sabbas Daniel
Nathan Wang
Affiliation:
Cypress Semiconductor Corporation, San Jose, CA 9513
Jin Wu
Affiliation:
Cypress Semiconductor Corporation, San Jose, CA 9513
Judy Tseng
Affiliation:
Cypress Semiconductor Corporation, San Jose, CA 9513
George Ji
Affiliation:
Cypress Semiconductor Corporation, San Jose, CA 9513
Sabbas Daniel
Affiliation:
Cypress Semiconductor Corporation, San Jose, CA 9513

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 9 , Issue S02 , August 2003 , pp. 486 - 487
Copyright
Copyright © Microscopy Society of America 2003