Hostname: page-component-586b7cd67f-gb8f7 Total loading time: 0 Render date: 2024-12-01T04:42:13.773Z Has data issue: false hasContentIssue false
  • English
  • Français

Statistical Consideration in EDS Microanalysis

Published online by Cambridge University Press:  02 July 2020

Eric Lifshin
Eric Lifshin*
Affiliation:
General Electric Corporate Research and Development, Schenectady, NY
Get access

Extract

The overall precision of electron microprobe measurements has not been studied extensively. It is often only described in terms of the precision of individual x-ray measurements or worse yet by relying on some rule of thumb based on historical experience. This is unfortunate because the analyst is expected to determine whether his or her measurements can distinguish between two samples or if a particular component can be detected above background or in the presence of other elements. Thus precision is at the heart of establishing composition/structure/property relationships and clearly deserves more attention.

There are many sources of variability encountered in determining composition whether using energy dispersive (EDS) or wavelength dispersive (WDS) spectrometery. These include Instrumental Variables, i.e., beam voltage and current, specimen position and orientation, detector position, and measurement electronics; Specimen Preparation, i.e., how representative the sample is of the problem to be solved, specimen preparation and contamination, and quality of standards; Data Processing, i.e.,

Type
30 Years of Energy Dispersive Spectrometry in Microanalysis
Information
Microscopy and Microanalysis , Volume 4 , Issue S2: Proceedings: Microscopy & Microanalysis '98, Microscopy Society of America 56th Annual Meeting, Microbeam Analysis Society 32nd Annual Meeting, Atlanta, Georgia July 12-16, 1998 , July 1998 , pp. 208 - 209
Copyright
Copyright © Microscopy Society of America

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

1.Goldstein, J. I. et al., Scanning Electron Microscopy and X-ray Microanalysis, (1992).CrossRefGoogle Scholar
2. DTSA is available from the National Institutes of Standards and Technology, Gaithersburg, Md.Google Scholar
3.Joy, D. C., Monte Carlo Modeling for Electron Microscopy and Microanalysis, Oxford (1995).Google Scholar