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A Static Low Energy Ion Source for Local Surface Modification

Published online by Cambridge University Press:  25 July 2016

Johannes J L Mulders  and
Petrus HF Trompenaars
Johannes J L Mulders
Affiliation:
FEI Company, Achtseweg Noord 5, 5600KA Eindhoven, The Netherlands
Petrus HF Trompenaars
Affiliation:
FEI Company, Achtseweg Noord 5, 5600KA Eindhoven, The Netherlands

Abstract

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Abstract
Information
Microscopy and Microanalysis , Volume 22 , Supplement S3: Proceedings of Microscopy & Microanalysis 2016 , July 2016 , pp. 630 - 631
Copyright
© Microscopy Society of America 2016