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State of the first aberration-corrected, monochromized 200kV FEG-TEM

Published online by Cambridge University Press:  16 July 2003

Gerd Benner ,
Alexander Orchowski ,
Max Haider  and
Peter Hartel
Alexander Orchowski*
Affiliation:
LEO Electron Microscopy Group, Carl Zeiss S-M-T AG, D-73446 Oberkochen, Germany
Peter Hartel
Affiliation:
CEOS GmbH, D-69126 Heidelberg, Germany
*
Corresponding author: [email protected]

Abstract

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Information
Microscopy and Microanalysis , Volume 9 , Issue S02 , August 2003 , pp. 938 - 939
Copyright
Copyright © Microscopy Society of America 2003